The influence of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers
Дата
2011
ORCID
DOI
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Назва журналу
Номер ISSN
Назва тому
Видавець
American Institute of Physics
Анотація
Impact of Ar gas pressure (1−4 mTorr) on the growth of amorphous interlayers in Mo/Si multilayers deposited by magnetron sputtering was investigated by small-angle x-ray scattering (l=0.154 nm) and methods of cross-sectional transmission electron microscopy. Some reduction of thickness of the amorphous inter-layers with Ar pressure increase was found, while composition of the layers was enriched with molybdenum. The interface modification resulted in raise of EUV reflectance of the Mo/Si multilayers
Опис
Ключові слова
multilayer X-ray mirror, interlayer composition, pressure variation, magnetron sputtering
Бібліографічний опис
The influence of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers / Y. P. Pershyn [et al.] // SPIE. – 2011. – Vol. 8139m. – P. 0N1-0N11.