Mechanisms of radiation damage to Sc/Si multilayer mirrors under EUV laser irradiation

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dc.contributor.authorPershyn, Yuriy P.en
dc.contributor.authorZubarev, Evgeniy N.en
dc.contributor.authorVoronov, D. L.en
dc.contributor.authorSevryukova, V. A.en
dc.contributor.authorKondratenko, V. V.en
dc.contributor.authorVaschenko, G.en
dc.contributor.authorGrisham, M.en
dc.contributor.authorMenoni, C. S.en
dc.contributor.authorRocca, J. J.en
dc.contributor.authorArtioukov, Y. A.en
dc.contributor.authorUspenskii, Y. A.en
dc.contributor.authorVinogradov, A . V.en
dc.date.accessioned2022-06-28T13:59:05Z
dc.date.available2022-06-28T13:59:05Z
dc.date.issued2009
dc.description.abstractSpecific structural changes in Sc/Si multilayer mirrors irradiated with extreme ultraviolet (EUV) laser single pulses (λ = 46.9 nm) at near damage threshold fluences (0.04–0.23 J cm−2) are analysed. We have identified melting of surface layers as the basic degradation mechanism for the mirrors. Both heat generation during silicide formation and low heat conduction of the layered system significantly decreases the degradation threshold of Sc/Si multilayer mirrors compared with bulk materials. The results are relevant to the use of the multilayer mirrors for shaping and directing the intense beams produced by the new generation of coherent EUV sourcesen
dc.identifier.citationMechanisms of radiation damage to Sc/Si multilayer mirrors under EUV laser irradiation / Y. P. Pershyn [et al.] // Journal of Physics D: Applied Physics. – Bristol (united Kingdom), 2009. – Vol. 42. – P. 1-11.en
dc.identifier.doidoi.org/10.1088/0022-3727/42/12/125407
dc.identifier.urihttps://repository.kpi.kharkov.ua/handle/KhPI-Press/57520
dc.language.isoen
dc.publisherIOP Publishing Ltden
dc.subjectspecific structural changes in Sc/Si multilayer mirrors irradiateden
dc.subjectmelting of surface layersen
dc.subjectdegradation mechanism for the mirrorsen
dc.subjectcпецифічні структурні зміни в опромінених багатошарових дзеркалах Sc/Siuk
dc.subjectплавлення поверхневих шарівuk
dc.subjectмеханізм деградації дзеркалuk
dc.titleMechanisms of radiation damage to Sc/Si multilayer mirrors under EUV laser irradiationen
dc.typeArticleen

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