Crystal growth in amorphous films of tantalum pentoxide

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Ескіз

Дата

2023

Автори

DOI

https://doi.org/10.1080/15421406.2023.2215032

Науковий ступінь

Рівень дисертації

Шифр та назва спеціальності

Рада захисту

Установа захисту

Науковий керівник

Члени комітету

Видавець

Анотація

Amorphous films are formed on substrates at room temperature in the process of pulsed laser sputtering of Ta target in an oxygen atmosphere. Electron beam irradiation causes their crystallization with the formation of Ta2O5 crystals with hexagonal lattice. Electron microscope investigation, including “in situ” and video recording methods, revealed the following crystallization modes in different regions of the same amorphous film of Ta2O5. 1. Island polymorphous crystallization. 2. Interjacent crystallization mode. 3. Layer polymorphous crystallization mode. The presence of three different crystallization modes is explained by the phenomenon of polyamorphism in amorphous films.

Опис

Ключові слова

crystallization modes, polyamorphism, relative length, tantalum pentoxide, video

Бібліографічний опис

Bagmut A. G. Crystal growth in amorphous films of tantalum pentoxide [Electronic resource] / A. G. Bagmut // Molecular Crystals and Liquid Crystals. – Electronic text data. – 2023. – P. 1-9. – Access mode: https://www.tandfonline.com/doi/full/10.1080/15421406.2023.2215032, free (date of the application 31.05.2023.).