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Документ Size effects in chlorine doped PbSe thin films(Institute of Thermoelectricity, 2015) Menshikova, S. I.; Rogacheva, E. I.; Sipatov, A. Yu.; Krivonogov, S. I.; Matychenko, P. V.The possibility of obtaining strongly degenerate (≈ 3·10²⁰ сm⁻³) PbSe thin films (d = 5 – 220 nm) with n-type conductivity by thermal evaporation in vacuum of PbSe crystals doped with PbCl₂, with subsequent condensation onto (001) KCl substrates was established. It was shown that the films had high homogeneity degree, no grain structure was observed. The thickness dependences of thermoelectric properties (the Seebeck coefficient S, the Hall coefficient RH and the electric conductivity σ) of thin films were obtained. In the thickness range d ≈ 5 ÷ 30 nm, oscillation properties were observed with growth of d that are attributable to electron gas quantization. The calculation of S(d) dependence on the assumption of size quantization with regard to contribution of several subbands and the thickness dependence of the Fermi energy was shown to be in agreement with the experimental data. In the region of d > 30 nm there was growth of S and σ with thickness, which is attributable to manifestation of classical size effect and interpreted in the framework of Fuchs-Sondheimer and Mayer theories.