Taran, A. V.Garkusha, I. E.Taran, V. S.Muratov, R. M.Skoblo, T. S.Romaniuk, S. P.Starikov, V. V.Baturin, A. A.2020-01-212020-01-212019Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel / A. V. Taran [ et al.] // Problems of Atomic Science and Technology. Ser. : Plasma Physics (25). – 2019. – No. 1 (119). – P. 243-247.https://repository.kpi.kharkov.ua/handle/KhPI-Press/43919The nanocrystalline films of zirconium nitride have been synthesized using ion-plasma vacuum-arc deposition technique in combination with high-frequency discharge (RF) on AISI 430 stainless steel at 150oC. Structure examinations X-ray fluorescent analysis (XRF), X-ray diffraction analysis (XRD), scanning electron microscopy (SEM) with microanalysis (EDS), and transmission electron microscopy (TEM), nanoidentation method – were performed to study phase and chemical composition, surface morphology, microstructure and nanohardness of coatings. The developed technology provided low-temperature coatings synthesis, minimized discharge breakdown decreasing formation of macroparticles (MPs) and allowed to deposit ZrN coatings with hardness variation 26.6…31.5 GPa. It was revealed that ZrN single-phase coatings of cubic modification with finecrystalline grains of 20 nm in size were formed.enzirconium nitridespectrometermechanical propertiesnanoindentation diagramsArticlehttps://orcid.org/0000-0001-7541-8303