Beresnev, V. M.Sobol, O. V.Andreev, A. A.Gorban, V. F.Klimenko, S. A.Litovchenko, S. V.Kovteba, D. V.Meilekhov, A. A.Postelnyk, A. A.Nemchenko, U. S.Novikov, V. Yu.Maziilin, B. A.2023-01-112023-01-112018Formation of Superhard State of the TiZrHfNbTaYN Vacuum–Arc High-Entropy Coating / V. M. Beresnev [et al.] // Journal of Superhard Materials. – 2018. – Vol. 40, No. 2. – P. 102-109.https://repository.kpi.kharkov.ua/handle/KhPI-Press/61108Complex studies of the formation of the superhard state in the TiZrHfNbTaYN vacuum-arc high-entropy coating were carried out. Based on the approach of the structural surface engineering, the regularities of the formation of the triads composition–structure–physico-mechanical properties depending on the supplied potential displacement are established. It is shown that the increase of Ub at the formation of a coating leads to a decrease of the relative content of a light (Ti) and increase of a heavy (Ta, Hf) metal components, which is determined by radiationally stimulated processes in a near surface region at the deposition. The formation of the single-phase state (based on the fcc of metal lattice) in the range Ubfrom –50 to –250 V and revealed the formation of the preferred orientation of the crystallites with the axis [111], which is perpendicular to the growth plane. The increase of the perfection of the texture with the [111] axis with increasing Ub is accompanied with an increase of the coatings hardness, which makes it possible to achieve the superhard state (H = 40.2 GPa) at Ub = –250 V.enhigh-entropy coatingdisplacement potentialcompositionstructurepropertiestexturesuperhard stateArticledoi.org/10.3103/S1063457618020041https://orcid.org/0000-0002-4497-4419https://orcid.org/0000-0002-5290-7566