Регрессионный анализ математической модели ионно-плазменной обработки поверхности стекла

Abstract

Change of the glass surface properties using plasma processing is a progressive technological method that allows achieves the surface layer with desired physical properties. Quality of the modified surface of the glass layer depends on such parameters as: type of the source implantation material, the composition of processed glass, the flow rate and type of the plasma gas, energy and geometric parameters of the plasmatron. The ability of preliminary determination of optimal ranges of process parameters to ensure the implantation of the elementary particles of the modifying material (atoms and ions) and their uniform distribution in the diffusion layer results in a reduction in specific consumption of implantation material during the formation of high quality penetrating coatings on a glass surface with a simultaneously increasing the processing performance. The construction of a mathematical model of ion-plasma processing of the glass surface based on the regression analysis is considered in the article. The resulting model allows determine in what direction and to what extent is it necessary to vary the factors to achieve optimal quality of the coatings. From the analysis of the mathematical model of ion-plasma processing of the glass surface it found that the maximum impact on the quality of the coatings has a flow rate of an aqueous solution of the implantation material and distance processing.