Перегляд за Автор "Zvyagolsky, A. V."
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Документ Changes in the structural state and properties of vacuum-arc coatings based on high-entropy alloy TiZrHfNbTa under the influence of nitrogen pressure and bias potential at deposition(2018) Sobol, O. V.; Andreev, A. A.; Mygushchenko, R. P.; Gorban, V. F.; Stolbovoy, V. A.; Meylekhov, A. A.; Subbotina, V. V.; Kovteba, D. V.; Zvyagolsky, A. V.; Vuets, A. E.Complex studies have been carried out on the effect of nitrogen pressure and the negative bias potential on the structure and properties of vacuum-arc nitride coatings based on the high-entropy alloy TiZrHfNbTa. It is defined that the change in pressure during deposition (in the range 0.01...4 mTorr) mainly affects the nitrogen atoms content in the coating. The feed of a negative bias potential to the substrate (Ub = -50...-250 V) makes it possible to control the content of the metallic component using the effect of selective sputtering of atoms in the formation of coatings. Determined, that as the pressure increases the structural state associated with the predominant growth orientation (axial texture) of the crystallites changes. The texture changes in the sequence [311] → [311] + [111] → [111] with increasing pressure for a six-element (TiZrHfVNbTa)N nitride and the texture state changes in the sequence [110] → [110] + [111] → [111] for a five-element (TiZrHfNbTa)N nitride. It is shown that the presence of a bi-textured state in the coating makes it possible to achieve an ultrahard state with a hardness exceeding 50 GPa.Документ The use of negative bias potential for structural engineering of vacuum-arc nitride coatings based on high-entropy alloys(2019) Sobol, O. V.; Andreev, A. A.; Gorban, V. F.; Postelnyk, H. O.; Stolbovoy, V. A.; Zvyagolsky, A. V.; Dolomanov, A. V.; Kraievska, Zh. V.The effect of negative bias potential (Ub = -40, -110, and -200 V) during the deposition of multi-element coatings on their composition, structure and mechanical properties was studied. It was established that during the transition from a multi-element alloy to a nitride, a single-phase state possible to form on its basis (based on the fcc metal lattice, structural type NaCl). In this case, the composition (FeCoNiCuAlCrV)N of coatings with increasing Ub is depleted by the element with the lowest enthalpy of formation of nitride (Cu). In (AlCrTiNbSi)N and (AlCrTiZrNbV)N coatings, the content of low-mass elements (Si and Al) decreases with increasing Ub. In (TiZrHfVNb)N coatings of strong nitride-forming elements with increasing Ub to 200 V, the composition practically does not change. The structure of such coatings is characterized by the presence of a texture with the [111] axis. The presence of weak nitride-forming elements in (FeCoNiCuAlCrV)N coatings leads to the formation of texture [110] for large Ub = 110…200 V. In such coatings, the hardness does not exceed 35 GPa. It is shown that to achieve high hardness at high Ub it is necessary to increase the content in the high-entropy alloy of elements with high nitride-forming ability. In this case, in (TiZrHfVNb)N coatings (made of strong nitride-forming elements with a large mass) at Ub = 200 V, the hardness exceeds 45 GPa.