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Документ The use of plasma-based deposition with ion implantation technology to produce superhard molybdenum-based coatings in a mixed (C2H2+N2) atmosphere(2018) Sobol, O. V.; Andreev, A. A.; Mygushchenko, R. P.; Beresnev, V. M.; Meylekhov, A. A.; Postelnyk, A. A.; Kravchenko, S. A.; Tabaza, Taha. A.; Al-Qawabah, Safwan M.; Al-Qawabeha, Ubeidulla F.; Stolbovoy, V. A.; Serdyuk, I. V.; Kolesnikov, D. A.; Kovaleva, M. G.The influence of the pressure of a mixed gaseous atmosphere (80%C2H2+20%N2) and the supply of a high-voltage negative potential in a pulsed form on the elemental and phase composition, structure and physico-mechanical characteristics of the vacuum-arc molybdenum-based coatings. It is shown that in the temperature deposition range 400…550 °С as a result of plasma-chemical reactions, the maximum nitrogen atoms content in the coating does not exceed 1.5 at.%. It is found, that at the maximum pressure of РC2H2+N2= 2.3∙10-1 Pа when the γ-MoC phase is formed, an superhard state of 50.5 GPa (at a constant potential -200 V, without additional high-voltage pulse action) and 51.1 GPa (at a constant potential -200 V, with additional high-voltage pulse action) is reached.