Кафедри

Результати пошуку

Зараз показуємо 1 - 1 з 1

Influence of pressure of working atmosphere on the formation of phase-structural state and physical and mechanical properties of vacuum-arc multilayer coatings ZrN/CrN
(2016) Sobol, O. V.; Andreev, A. A.; Gorban, V. F.; Stolbovoy, V. A.; Meylekhov, A. A.; Postelnyk, A. A.; Dolomanov, A. V.
For multilayer coating system ZrN/CrN determined the effect of the pressure of the working atmosphere of nitrogen (Pɴ), DC (˗Us) and pulse (-Ui) negative bias potential during the deposition and the thickness of the layers in the period on the phase composition, texture, substructural characteristics and physical-mechanical properties. It is found that for Рɴ = (2.2...12)·10-4 Torr in the layers of chromium nitride formed on a lower nitrogen phase with the β-Cr2N simple hexagonal crystal lattice, and in the zirconium nitride layers are formed of a stoichiometric ZrN phase with a cubic lattice. Such a multilayer coating (layer thickness about 50 nm) at the maximum in this range Pɴ = 1.2·10-3 Torr is most solid (39 GPa) with a modulus of elasticity of 268 GPa and the ratio H/E = 0.145. At higher Pɴ, when the layers are formed phase stoichiometric composition with homogeneous crystal lattices (ZrN and СrN) hardness of the composition is not more than 33 GPa. The mechanisms of the effects observed are based on the higher barrier properties of the interphase boundary layers with different types of crystal lattices was discussed.