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Документ The Use of Negative Bias Potential for Structural Engineering of Vacuum-Arc Nitride Coatings Based on FeCoNiCuAlCrV High-Entropy Alloy(Sumy State University, 2018) Sobol, O. V.; Andreev, A. A.; Gorban, V. F.; Meylekhov, A. A.; Postelnуk, A. A.; Stolbovoy, V. A.; Zvyagolskiy, A. V.The effect of negative bias potential (Ub = – 40, – 110, and – 200 V) upon the deposition of multielement coatings on their composition, structure, and mechanical properties was studied. It is shown that when using a high-entropy multielement (of 7 elements) FeCoNiCuAlCrV alloy, it is possible to obtain a single-phase nitride (FeCoNiCuAlCrV)N. Nitride has an fcc crystal lattice (structural type NaCl). It has been established that with an increase in Ub in the structural state occurs transition from practically nontextured (polycrystalline) to the preferential orientation of the growth of crystallites with the [111] texture axis (at Ub = – 110 V) and [110] (at Ub = – 200 V). This is accompanied by a decrease in the lattice period, as well as a decrease in hardness and modulus of elasticity. For coatings (FeCoNiCuAlCrV) N, the highest hardness of 38 GPa is achieved by using the smallest (– 40 V) bias potential during the deposition process. It is shown that to achieve high hardness at high Ub it is necessary to increase the content in the highentropy alloy of elements with high nitride-forming ability.Документ Influence of the Bias Potential and the Pressure of the Nitrogen Atmosphere on the Structure and Properties of Vacuum-arc Coatings Based on the AlCrTiZrNbV High-entropy Alloy(Sumy State University, 2018) Sobol, O. V.; Andreev, A. A.; Gorban, V. F.; Postelnyk, A. A.; Stolbovoy, V. A.; Zvyagolskiy, A. V.The effect of the constant bias potential (Ub) supplied to the substrate upon condensation and pressure of the nitrogen atmosphere (PN) on the elemental composition, growth morphology, texture, and physical-mechanical characteristics of vacuum-arc (AlCrTiVZrNb)Nx coatings is studied. It is established that with increasing Ub from – 110V to – 200V, the axis of preferential growth of crystallites of the fcc phase from [100] to [110] changes. Such a change is accompanied by a decrease in the hardness (H) and the ratio H/E (where E is the modulus of elasticity). The conditions for the formation of the preferential orientation of the crystallites (axial texture) of vacuum-arc (AlCrTiVZrNb)Nx coatings and the influence of texture on mechanical properties are discussed. It was established that the change in PN in the range Torr basically allows to vary the degree of filling of the coating with nitrogen atoms. Based on the revealed regularities, the conditions for achieving high hardness for vacuum-arc coatings of nitrides AlCrTiVZrNb high-entropy alloy are substantiated. Because of the presence in the alloy of elements with a relatively low heat of nitride formation, in order to achieve high hardness, it is necessary to use deposition conditions with relatively low energy of bombarding atoms. The use of a low Ub = –110 V at the highest pressure Torr allows achieving an superhard state with a hardness of 44 GPa.Документ Changes in the structural state and properties of vacuum-arc coatings based on high-entropy alloy TiZrHfNbTa under the influence of nitrogen pressure and bias potential at deposition(2018) Sobol, O. V.; Andreev, A. A.; Mygushchenko, R. P.; Gorban, V. F.; Stolbovoy, V. A.; Meylekhov, A. A.; Subbotina, V. V.; Kovteba, D. V.; Zvyagolsky, A. V.; Vuets, A. E.Complex studies have been carried out on the effect of nitrogen pressure and the negative bias potential on the structure and properties of vacuum-arc nitride coatings based on the high-entropy alloy TiZrHfNbTa. It is defined that the change in pressure during deposition (in the range 0.01...4 mTorr) mainly affects the nitrogen atoms content in the coating. The feed of a negative bias potential to the substrate (Ub = -50...-250 V) makes it possible to control the content of the metallic component using the effect of selective sputtering of atoms in the formation of coatings. Determined, that as the pressure increases the structural state associated with the predominant growth orientation (axial texture) of the crystallites changes. The texture changes in the sequence [311] → [311] + [111] → [111] with increasing pressure for a six-element (TiZrHfVNbTa)N nitride and the texture state changes in the sequence [110] → [110] + [111] → [111] for a five-element (TiZrHfNbTa)N nitride. It is shown that the presence of a bi-textured state in the coating makes it possible to achieve an ultrahard state with a hardness exceeding 50 GPa.