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Постійне посилання на розділhttps://repository.kpi.kharkov.ua/handle/KhPI-Press/35393
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Документ Influence of the magnitude of the bias potential and thickness of the layers on the structure, substructure, stress-deformed state and mechanical (TiMo)N/(TiSi)N coatingsl characteristics of vacuum-arc multi-layered(2020) Sobol, O. V.; Postelnyk, H. O.; Meylekhov, A. A.; Subbotina, V. V.; Stolbovoy, V. A.; Dolomanov, A. V.; Kolesnikov, D. A.; Kovaleva, M. G.; Sukhorukova, Yu. V.Layers based on titanium nitride doped with molybdenum and silicon were used to create a multilayer composite. In this case, the mismatch between the lattice periods of (TiMo)N and (TiSi)N layers was about 1%. It was found that in the (TiMo)N/(TiSi)N multilayer composite, such a mismatch of the periods in the constituent layers does not change the single-phase state of the composite even at relatively large layer thicknesses (about 350 nm). The creation of a (TiMo)N/(TiSi)N composite with a nanometer layer thickness allows one to reduce the magnitude of macrostresses (a large value of which is characteristic of single-layer (TiMo)N coatings) and change the substructural characteristics in a wide range of values. It has been established that the use of multi-element (TiMo)N and (TiSi)N layers in a multilayer coating design allows one to achieve a high-hard state with high adhesive strength and good tribological characteristics. The highest properties (hardness – 34.8 GPa and adhesive strength 166.09 N) were achieved in coatings obtained at Ub = -200 V and a layer thickness of 80 nm, which are characterized by compression macrostresses of 7.85 GPa and microstrains 0.75%.