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Structural Engineering of the Multilayer Vacuum Arc Nitride Coatings Based on Ti, Cr, Mo and Zr
(Sumy State University, 2017) Sobol, O. V.; Postelnyk, A. A.; Meylekhov, A. A.; Andreev, A. A.; Stolbovoy, V. A.; Gorban, V. F.
The possibilities of structural engineering of multi-period vacuum-arc coatings based on nitrides of transition metals Ti, Cr, Mo, and Zr have been investigated by structural studies (X-ray diffraction and electron microscopy) in combination with measurement of hardness by indentation. The formation of phases with a cubic crystal lattice under nonequilibrium conditions under vacuum arc method of production. The supply of a negative bias potential of – 200V in mononitrides leads to the predominant formation of texture of crystallites with the [111] axis. The introduction of thin (about 10 nm) metal layers leads to a decrease in texture perfection [111] and texture formation [100]. This effect is associated with a change in the stress-strain state of nitride layers. It is determined that the composite multiperiod coatings (Me1N/Me2N)/(Me1/Me2) have a greater hardness and greater resistance compared to MeN/Me. For a multiperiod system with damping metal layers – (ZrN/CrN)/(Zr/Cr), superhard coatings with a hardness of 46 GPa were obtained.