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Документ Structure and Properties of Vacuum Arc Single-Layer and Multiperiod Two-Layer Nitride Coatings Based on Ti(Al):Si Layers(Sumy State University, 2017) Beresnev, V. M.; Sobol, O. V.; Pogrebnjak, A. D.; Lytovchenko, S. V.; Stolbovoy, V. A.; Srebniuk, P. A.; Novikov, V. Ju.; Doshchechkina, I. V.; Meylehov, A. A.; Postelnyk, A. A.; Nyemchenko, U. S.; Mazylin, B. A.; Kruhlova, V. V.The paper provides an analysis of impact of deposition conditions on structural and phase state and thermal stability of vacuum arc coatings based on Ti(Al):Si layers. We studied single-phase single-layer coatings, and multiperiod bilayer coatings with second phase nitride interlayers of one of the following three metals: Mo, Cr or Zr. It was established that hexagonal and cubic lattices may form in the coatings when transition to the cubic lattice occurs with Al content of about 25 at. %. Presence of second nanoscale (7-8 nm) layers in bilayer multiperiod compositions, which consist of one nitride from CrNx, MoNx or ZrNx group, does not change the type of lattice in [Ti(Al):Si]Nx layers. Also, an fcc lattice with a strong or weak texture [111] forms in CrNx and ZrNx layers, while crystallites with hexagonal lattice form in MoNx layers. High-temperature annealing at 700 °С during 40 minutes leads to a significant (by 23 % or up to H 47.56 GPa) increase in microhardness of coating of the [Ti(Al)]Nx/ZrNy system due to formation of a nano-size structure with an average size of crystallites of 3.6 nm in [Ti(Al)]Nx layers, and 6.3 nm in ZrNx layers.