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Документ The Use of Negative Bias Potential for Structural Engineering of Vacuum-Arc Nitride Coatings Based on FeCoNiCuAlCrV High-Entropy Alloy(Sumy State University, 2018) Sobol, O. V.; Andreev, A. A.; Gorban, V. F.; Meylekhov, A. A.; Postelnуk, A. A.; Stolbovoy, V. A.; Zvyagolskiy, A. V.The effect of negative bias potential (Ub = – 40, – 110, and – 200 V) upon the deposition of multielement coatings on their composition, structure, and mechanical properties was studied. It is shown that when using a high-entropy multielement (of 7 elements) FeCoNiCuAlCrV alloy, it is possible to obtain a single-phase nitride (FeCoNiCuAlCrV)N. Nitride has an fcc crystal lattice (structural type NaCl). It has been established that with an increase in Ub in the structural state occurs transition from practically nontextured (polycrystalline) to the preferential orientation of the growth of crystallites with the [111] texture axis (at Ub = – 110 V) and [110] (at Ub = – 200 V). This is accompanied by a decrease in the lattice period, as well as a decrease in hardness and modulus of elasticity. For coatings (FeCoNiCuAlCrV) N, the highest hardness of 38 GPa is achieved by using the smallest (– 40 V) bias potential during the deposition process. It is shown that to achieve high hardness at high Ub it is necessary to increase the content in the highentropy alloy of elements with high nitride-forming ability.