Закономерности формирования структуры покрытий CrN, полученных вакуумно-дуговым испарением в атмосфере азота

Abstract

The questions of structural engineering of Cr-N system coatings produced by vacuum arc evaporation of Cr cathode in a nitrogen atmosphere are considered. As the variable physical and technological parameters we have used the following ones: pressure of nitrogen atmosphere (3.5…48) 10–4 Torr and negative bias potential applied to the substrate in constant (Ub – 120 V) and pulse (Uip – 1200 V) modes. Increase in the pressure without pulse action allows to transfer from Cr + Cr2N phase to phase of textured CrN crystallites with [111] axis. The transition from the metallic phase to the mechanical nitride is accompanied by a decrease in the average size of crystallites. Additional supply of impulse capacity allows to intensify the process of formation of nitrides and stimulates formation at high pressure of radiationresistant texture units with the [110] axis.