Structure and Optical Properties of CdS Nanoscale Thin Films Obtained by Direct Current Magnetron Sputtering

Abstract

The influence of physical and technological condensation mode by direct current magnetron sputtering with preheating of the target on the crystal structure and optical properties of grown CdS nanoscale thin films was investigated. CdS layers on glass substrates with hexagonal structure 80-100 nm thick under conditions plasma discharge current density is 1.1 mA/cm² and the deposition rate is 18-20 nm/min were obtained. The band gap CdS in nanoscale thin films is Eg=2,4-2,43 eV. After annealing in vacuum optical transparency of CdS films is 90%, which allows to use such nanoscale thin films as a transparent window layer in solar cells based on heterostructure of CdS/CdTe.