Движение частиц шлама и износа полировального порошка в зоне контакта инструмента и обрабатываемой детали

Abstract

As a result of studying the regularities of the movement of slime particles and the wear of the polishing powder, trajectories of the motion are calculated inside the slurry, which are rings located in close proximity to the surface to be treated in a zone of thickness 150 nm, approximately equal to half the grain size of the polishing powder.