Полирование прецизионных поверхностей оптоэлектронных элементов из сапфира

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НТУ "ХПИ"

Abstract

As a result of studies of regularities polishing flat surfaces of elements of single crystal sapphire the possibility use as a criterion for the efficiency of removal of the processed material and the reduced energy transfer shows the appropriateness of the use of aqueous suspensions of polishing powders and colloidal systems of nanoparticles.

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Филатов А. Ю. Полирование прецизионных поверхностей оптоэлектронных элементов из сапфира / А. Ю. Филатов // Резание и инструмент в технологических системах = Cutting & tool in technological system : междунар. науч.-техн. сб. – Харьков : НТУ "ХПИ", 2015. – Вып. 85. – С. 309-313.

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