Кафедра "Фізика металів і напівпровідників"

Постійне посилання колекціїhttps://repository.kpi.kharkov.ua/handle/KhPI-Press/4703

Офіційний сайт кафедри http://web.kpi.kharkov.ua/fmp

Від 2002 року кафедра має назву "Фізика металів і напівпровідників", попередня назва – кафедра металофізики.

Кафедра металофізики організована в 1930 році у складі фізико-механічного факультету ХММІ. Деканом факультету був у ті роки видатний вчений-фізик, академік Іван Васильович Обреїмов.

Кафедра входить до складу Навчально-наукового інституту комп'ютерного моделювання, прикладної фізики та математики Національного технічного університету "Харківський політехнічний інститут". За час існування кафедрою підготовлено близько 3000 інженерів, у тому числі і для зарубіжних країн.

У складі науково-педагогічного колективу кафедри працюють: 3 доктора та 2 кандидата фізико-математичних наук; 3 співробітника мають звання професора.

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Mechanisms of radiation damage to Sc/Si multilayer mirrors under EUV laser irradiation
(IOP Publishing Ltd, 2009) Pershyn, Yuriy P.; Zubarev, Evgeniy N.; Voronov, D. L.; Sevryukova, V. A.; Kondratenko, V. V.; Vaschenko, G.; Grisham, M.; Menoni, C. S.; Rocca, J. J.; Artioukov, Y. A.; Uspenskii, Y. A.; Vinogradov, A. V.
Specific structural changes in Sc/Si multilayer mirrors irradiated with extreme ultraviolet (EUV) laser single pulses (λ = 46.9 nm) at near damage threshold fluences (0.04–0.23 J cm−2) are analysed. We have identified melting of surface layers as the basic degradation mechanism for the mirrors. Both heat generation during silicide formation and low heat conduction of the layered system significantly decreases the degradation threshold of Sc/Si multilayer mirrors compared with bulk materials. The results are relevant to the use of the multilayer mirrors for shaping and directing the intense beams produced by the new generation of coherent EUV sources
The structure of Mo/Si multilayers prepared in the conditions of ionic assistance
(Springer, 2008) Zubarev, Evgeniy N.; Kondratenko, V. V.; Sevryukova, V. A.; Yulin, S. A.; Feigl, T.; Kaiser, N.
The influence of a negative substrate-applied bias potential on the structure of periodic Mo/Si multilayer compositions has been investigated by means of cross-sectional electron microscopy, small-angle X-ray reflectivity, X-ray diffraction and by modeling the small-angle spectra. It is known that the crystalline structure of molybdenum layers is the main source of interface roughness. In the absence of a bias potential application, the interface roughness tends to develop from the substrate towards the surface of a Mo/Si multilayer composition. A negative bias potential (up to −200 V) applied to a substrate during silicon layer deposition leads to smoother interfaces and improves the layer morphology. After increasing the bias potential over −200 V a considerable growth of an amorphous interlayer transition zone can be observed at Si-on-Mo interfaces. By raising the bias potential during the deposition of Mo layers a development of roughness at Mo-on-Si interfaces as well as growing interlayer thicknesses were found.
Analysis of 46.9-nm Pulsed Laser Radiation Aftereffects in Sc/Si Multilayer X-Ray Mirrors
(Springer, 2007) Pershyn, Yuriy P.; Voronov, D. L.; Zubarev, Evgeniy N.; Sevryukova, V. A.; Kondratenko, V. V.; Vaschenko, G.; Grisham, M.; Menoni, C. S.; Rocca, J. J.; Vinogradov, A. V.; Artyukov, I. A.; Uspenskii, Yu. A.
Specific structural changes in Sc/Si multilayers (MLs) irradiated by nanosecond 46.9-nm single laser pulses with fluences of 0.04-5.00 J/cm2 were studied by methods of SEM and cross-sectional TEM. The threshold damage was found to be 0.08 J/cm2 The ML melts down under the fluence F >0.08 J/cm2 and the exothermic reaction of silicide formation starts. Main degradation mechanisms of MLs are discussed. The results of this study can be used for development of advanced multilayer mirrors capable handling the intense radiation conditions of new generation coherent X-ray sources.
Structural transformation in C/Si multilayer after annealing
(Научный центр физических технологий МОН Украины; НАН Украины, 2012) Zhuravel, I. O.; Bugayev, Ye. A.; Konotopsky, L. E.; Zubarev, E. M.; Sevryukova, V. A.; Kondratenko, V. V.
Amorphous C/Si multilayers were prepared by DC magnetron sputtering technique and investigated by transmission electron microscopy and low-angle x-ray diffraction methods after annealing at 650 and 950 °C. The amorphous interlayers of 0.5 − 0.6 nm thick were found at C/Si and Si/C interfaces being of different density and composition. Amorphous structure of the multilayer is stable up to 950 °C when crystallization of α-SiC occurs and voids form in α-Si layer.
The influence of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers
(American Institute of Physics, 2011) Pershyn, Yuriy P.; Gullikson, E. M.; Artyukov, I. A.; Kondratenko, V. V.; Sevryukova, V. A.; Voronov, D. L.; Zubarev, Evgeniy N.; Vinogradov, A. V.
Impact of Ar gas pressure (1−4 mTorr) on the growth of amorphous interlayers in Mo/Si multilayers deposited by magnetron sputtering was investigated by small-angle x-ray scattering (l=0.154 nm) and methods of cross-sectional transmission electron microscopy. Some reduction of thickness of the amorphous inter-layers with Ar pressure increase was found, while composition of the layers was enriched with molybdenum. The interface modification resulted in raise of EUV reflectance of the Mo/Si multilayers
Reactive diffusion in Sc/Si multilayer X-ray mirrors with CrB2 barrier layers
(Springer, 2011) Pershyn, Yuriy P.; Zubarev, Evgeniy N.; Kondratenko, V. V.; Sevryukova, V. A.; Kurbatova, S. V.
Processes undergoing in Sc/Si multilayer X-ray mirrors (MXMs) with periods of ∼27 nm and barrier layers of CrB20.3- and 0.7-nm thick within the temperature range of 420–780 K were studied by methods of small-angle Xray reflectivity (λ = 0.154 nm) and cross-sectional transmission electron microscopy. All layers with the exception of Sc ones are amorphous. Barrier layers are stable at least up to a temperature of 625 K and double the activation energy of diffusional intermixing at moderate temperatures. Introduction of barriers improves the thermal stability of Sc/Si MXMs at least by 80 degrees. Diffusion of Si atoms through barrier layers into Sc layers with formation of silicides was shown to be the main degradation mechanism of MXMs. A comparison of the stability for Sc/Si MXMs with different barriers published in the literature is conducted. The ways of further improvement of barrier properties are discussed