DC magnetron sputtering method for obtaining nanoscale semiconductor films

Abstract

It has been carried out the experimental studies of the process of semiconductor direct current magnetron sputtering, and the impact of a magnetron sputtering mode on optical properties of solar cell functional layers. In order to create thin-film solar cells based on CdTe, thin films for the base layers of thin film solar cells was obtained on flexible polyimide and glass substrates by direct current magnetron sputtering. It has found that obtained by DC magnetron sputtering method ZnO and CdS nanoscale thin films and CdTe layers have optimal optical properties for obtaining thin film solar cells based on CdS/CdTe heterosystem.