DC magnetron sputtering method for obtaining nanoscale semiconductor films
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Інститут сцинтиляційних матеріалів Національної академії наук України
Abstract
It has been carried out the experimental studies of the process of semiconductor direct current magnetron sputtering, and the impact of a magnetron sputtering mode on optical properties of solar cell functional layers. In order to create thin-film solar cells based on CdTe, thin films for the base layers of thin film solar cells was obtained on flexible polyimide and glass substrates by direct current magnetron sputtering. It has found that obtained by DC magnetron sputtering method ZnO and CdS nanoscale thin films and CdTe layers have optimal optical properties for
obtaining thin film solar cells based on CdS/CdTe heterosystem.
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DC magnetron sputtering method for obtaining nanoscale semiconductor films / Yevgen Sokol, Andrii Dobrozhan, Andrey Meriuts, Alina Khrypunova // Functional Basis of Nanoelectronics : collection of sci. works of the 12th Intern. Sci. Conf., Kharkiv - Odesa, September, 2021. – Kharkiv - Odesa, 2021. – P. 16-19.